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    SEMI 표준규격 제정

SEMI의 산업표준규격은 세계반도체 장비 및 재료에 대한 가장 포괄적인 국제 표준규격입니다. 이 SEMI 표준규격은 세미가 수요자, 공급자 및 관련업계 전문인들과 상의하여 표준 규격 안을 만들며, 이 표준규격은 케미컬, 장비 자동화(하드웨어, 소프트웨어), 재료, 마이크로 패턴, 설비 및 안전등 열한 개 분야에 약 700여 개가 제정되어 있으며 매년 세 차례 신규 표준 및 개정 표준이 배포되고 있습니다

SEMI 국제 표준
Increasingly, the progress of advanced manufacturing technology is dependent upon industry standards that foster growth and innovation. SEMI facilitates the development of the industry's most respected and standards in support of our member's business and economic goals

























































 About the SEMI Standards Program

Why standards?
The SEMI International Standards Program is one of the key services offered by Semiconductor Equipment and Materials International (SEMI) for the benefit of the worldwide semiconductor, photovoltaic (PV) and flat panel display (FPD) industries. Standards offer a way to meet the challenges of increasing productivity while enabling business opportunities around the globe. The program, started over 35 years ago in North America, was expanded in 1985 to include programs in Europe and Japan, and now also has technical committees in Korea and Taiwan.

In 1997, the Program was expanded to cover other areas with activity in these industries among suppliers and users. The program operates as a neutral forum for the exchange of information among suppliers and users resulting in the production of timely and technically accurate specifications and other standards of economic importance to the industry. It is a vehicle for networking, partnering, and professional growth. Over 2,000 technologists worldwide, representing both device manufacturers and equipment and materials suppliers, participate in the program. These individuals work toward resolving a variety of process and product related issues in both the front and back-end areas in semiconductor, photovoltaic, and flat panel display manufacturing.

What are standards?

Standards are voluntary technical agreements between suppliers and customers, aimed at improving product quality and reliability at a reasonable price and steady supply. Standards ensure compatibility and inter-operability of goods and services.

SEMI standards are written documents in the form of specifications, guides, test methods, terminology, practices, etc. These documents are published in the 13 volume set of SEMI International Standards. SEMI standards cover every aspect of semiconductor manufacturing: Equipment Automation (Hardware and Software), Facilities, Gases, Materials, Microlithography, Packaging, Process Chemicals, and Traceability. Guidelines are also developed to cover safety related issues. In addition, standards are published for Flat Panel Displays. The publication catalogue provides a listing of the available standards and guidelines.

What are the benefits of participating?

The SEMI International Standards Program is first and foremost an opportunity for industry representatives to participate in state-of-the-art technical discussions, while also establishing the future direction of the semiconductor, photovoltaic, and FPD industries. By participating in standards, companies can influence important industry trends.

Companies utilizing standards can decrease manufacturing costs, increase reliability and productivity, and access global markets. On an individual basis, participation helps to reduce design work, provides access to evolving technology and technical developments, and aides personal development.

How are standards developed?

The SEMI International Standards program provides the framework and procedures for industry experts to meet, discuss, and develop essential standards and guidelines. Once the need for a standard has been identified with appropriate input from the user community, a task force is assembled to carry out the development effort. The task force may be regional or international. The result of the task force deliberations is a draft document responsive to industry needs. The draft is reworked until the task force develops consensus. After the task force is satisfied with its work, a wider consensus is developed by reporting to the parent regional technical committee or subcommittee to obtain comments from other members who did not participate directly in the document development. Frequently, broader international consensus is also obtained informally at this time.

When the regional technical committee agrees that a reasonable consensus has been reached, it initiates the worldwide balloting process to confirm that the document has global consensus. This process is managed by the SEMI Headquarters office. Regional offices in Europe, Japan, Korea, and Taiwan provide additional direct member interface. At least 60% of the issued ballots must be returned, so it is very important for ALL voting members to vote. All negative viewpoints must be considered, but unanimous agreement is not required.

The culmination of this development effort is the application of the new standard by the industry. Frequently, SEMI organizes Standards Technical Educational Programs (STEPs) to communicate new standards to the industry and show the advantages of using them. Users cite SEMI standards in their purchase specifications or utilize them in equipment and materials evaluations. Suppliers cite conformance of equipment, materials, or services to SEMI standards in their advertising and product literature. Use of SEMI standards is entirely voluntary, and so their usefulness to the industry can be assessed by the frequency of use.

Management of the program is provided by industry volunteers serving on administrative Regional Standards Committees in North America, Europe, and Japan. These committees also consider the document history to determine that all the mandated procedures have been followed, and that all opinions have been properly considered. The International Standards Committee has the overall responsibility for the conduct of the program. It establishes the regulations governing the program procedures and maintains relationships with other standard-setting organizations worldwide.

Benefits of Standards

Standards are a form of technology that transcends international boundaries. More importantly, SEMI Standards development conducted on an international basis spurs the dialogue that results in joint ventures, technology licenses, and outright sales. Standards are not just developed by and for engineers; their use should be viewed as a management tool, and consequently should be accompanied by high level support for standards-setting activities.

Compliancy to Standards can:

Increase Supplier Profitability by:

  • reducing product development cost and cycle time
  • increasing reliability
  • allowing focus on unique value-added features
  • enhancing market penetration/ensuring product acceptance
  • remaining at the forefront of technological advancements
  • smoothing technology migration

Increase Customer Satisfaction by:

  • reducing factory integration costs and production ramp time
  • lowering manufacturing costs
  • minimizing maintenance costs
  • clarifying expectations for suppliers
  • enabling incremental change at proportional cost

Increase Industry Efficiency by:

  • reducing/eliminating duplication of efforts
  • providing level of commonality
  • defining new markets
  • promoting competition by lowering barriers to entry
  • enabling evolving technology trends

How can I join the SEMI Standards Program?

There are no fees to participate in the SEMI International Standards Program; SEMI underwrites the costs of administering the program as a service to the industry. Meetings are open and anyone may attend. However, to participate as a member and receive information about the program, you are required to submit a membership application. This ensures that your address and interests are properly recorded in the data base and that you will receive mailings relevant to your interests. If your company affiliation or interests change, a new application should be submitted so that your records can be updated and maintained accurately. The membership application form allows you to specify your voting status for each committee in which you have an interest.

Members may join one or more technical committees as voting or non-voting members by filling out a simple application form. Online, printable versions of the SEMI International Standards Membership Application Form are available to interested individuals. To receive a membership packet, please contact your nearest regional office as found on the Standards Contact Information page. Please remember to provide your name and mailing address

when sending an e-mail message.

What are your benefits as a committee member?

As a registered member of a committee you will receive

  • notification of minutes of all meetings of the committee, worldwide,
  • announcements and agendas of committee meetings in your region,
  • general information on related technical programs and STEPs (Standards Technical Education Program)

As a voting member you have additional obligations to the program in that you are expected to vote on ALL letter ballots issued by the committee. You will automatically receive notification of draft documents and all letter ballots issued by the committee.

Global Technical Committees

At present, the Standards program operates the following technical committees:

  • Assembly & Packaging
  • Automated Test Equipment
  • Compound Semiconductor Materials
  • Environmental, Health & Safety
  • Facilities
  • FPD - Equipment
  • FPD - Material Handling
  • FPD - Materials & Components
  • FPD - Metrology
  • Gases
  • Information & Control
  • Liquid Chemicals
  • MEMS
  • Metrics
  • Micropatterning
  • Physical Interfaces & Carriers
  • Photovoltaic
  • Silicon Wafer
  • Traceability

Not all of the global committees are active in all regions, and in some regions several committees are consolidated into a local committee with broader scope.

Can I receive general program information without belonging to a specific committee?

Yes. Most of the general information and all of the current standards meeting schedule information may be found Standards section of the SEMI website. For more information, please contact the appropriate person under

Standards Contact Information.

Does my company need to be a SEMI corporate member to participate?

No. The program is available to the worldwide semiconductor industry without a membership fee. Participation is independent of whether your company is a SEMI corporate member or not.

Are SEMI activities subject to antitrust laws?

Yes. SEMI activities are subject to antitrust law as SEMI activities are a coordinated effort among competitors in the semiconductor equipment and materials

    SEMI(Semiconductor Equipment and Material International)
    반도체 제조설비에 대한 환경, 보건, 안전요구사항 규격으로 특정한 지역의 강제규격이 아닌 반도체 제조회사에서 요구하는 비강제 규격
    homepage : http://www.semi.org/

    Semiconductor Equipment and Materials International(SEMI)는 반도체 제조와 반도체 재료 산업의 국제무역협회의 약자로 반도체 제조·재료기계 등의 인증을 상징합니다. SEMI mark는 반도체 생산에 적합한 장비임을 나타내는 것입니다

    1970년 미국에서 설립되었으며, 시장개방과 자유무역을 위해 국제적인 기구로 발전 하였습니다. SEMI의 기본목적은 멤버들의 정부, 시민대표, 즉 그들의 고객에게 산업의 대한 인식을 개선하여, 전체적인 그들의 판매 기회를 확대 하는데 있습니다. SEMI는 이 목적을 성취하기 위해 그들의 제품·시장·회사를 보다 효과적으로 관리하고 경영하는데 필요한 자료들과 산업의 자세한 정보를 최신의 것으로 제공하고 있습니다. 또 반도체 제조 및 후 처리 공정에 사용되는 기계들에 대한 규격을 제정하고 이를 인증함으로 산업 발전의 기반을 조성하고 있습니다. 세계 유명 반도체 생산업체에서도 장비를 구입할 때는 이 기준에 따라 제3의 기관에서 시험한 보고서와 인증서의 제출을 요구하고 있습니다.    

    케미컬, 장비자동화(하드웨어, 소프트웨어), 재료, 가스, 마이크로 패턴, 설비 및 안전, 패키징, 평판 디스플레이 등 관련하여 열 개의 분야로 구분되어 있는 SEMI의 국제표준규격은 세계반도체와 평판 디스플레이 장비 및 재료에 대한 가장 포괄적인 국제 표준 규격입니다.

    표준규격은 수요자, 공급자 및 관련업체 전문인들의 추천과 요구를 수렴, 집대성한 규격서입니다. 전세계 반도체, 평판 디스플레이 업계로부터 3,000여명의 자원 봉사자들이 동참하여 표준 규격안을 만들고, 반도체와 평판 디스플레이 장비 및 재료산업의 수요자와 공급자들이 투표하여 결정되며 매년 3번씩 Update됩니다.

SEMI S2 반도체 제조설비에 대한 환경, 보건, 안전의 기술적 요구사항

    제9장 사용자에게 제공될 자료
       a. 안전수칙(사용자 메뉴얼) 작성
       b. SEMI S13 Checklist 적용

    제10장 위험경고라벨
       위험경고라벨 리스트 작성

    제11장 안전 인터록
       a. 안전 인터록 해제조건 (사용자 메뉴얼) 작성
       b. 해제시 작업자 보호와 위험의 최소화 방법 작성

    제12장 비상차단(EMO)
       System의 EMO와 연결에 대한 정보 작성

    제13장 전기적 설계
       시험보고서 - SEMI S9

    제14장 화재방지
       a. 위험분석을 위한 자료준비
       b. 화재에 대한 요약보고서 - SEMI S10

       SEMI S3 평가를 위한 준비자료 작성

    제16장 인체공학
       SEMI S8 평가를 위한 준비자료 작성

    제17장 위험에너지 격리
       위험에너지 표시와 구체적 정보제공

    제18장 기계적 설계
       Stability, Break-up during operation, moving parts & guards,
       extreme temperature 등 Risk Analysis

    제19장 지진보호
       a. 도면 (Support, connections, anchorage locations)
       b. Type of feet and location on base frame plan drawing
       c. Weight distribution on each foot
       d. Physical dimensions
       e. Weight and location of the center of mass
       f. Location on the equipment frame for anchorage

    제20장 자동화 운반기
       EN775를 적용한 위험분석자료준비

    제21장 환경적 고려사항
       제조자의 위험폐기물, 고형 폐기물, 폐수, 대기오염 감소방안의 문서화

    제22장 배기배출
       배기 파라미터의 문서화 (Duct velocity, volumetric flow rate, capture
       velocity, face velocity, hood static pressure, coefficient of entry,
       hood static pressure, duct diameter)

    제23장 화학물질
       a. 화학물질목록과 MSDS작성
       b. 화학물질에 대한 위험분석
       c. 위험의 처리방안 작성
       d. 개인용 보호장구(PPE)의 사용설명서 작성
       e. 위험가스의 사용과 연속적 검출방법 작성
       f. 위험경고라벨 작성

    제24장 이온화 방사선
       a. 방사선물질에 대한 설명서 작성
       b. 각 국가의 허가사항을 작성
       c. 관리방법 (거리, 시간, 표준운전, 라벨링) 작성
       d. 기준치에 대한 측정치의 문서화방법 작성
       e. 측정방법 (측정방법, 파라미터, 측정위치, 측정장비)

      ● 시험검사

       각종 SEMI 안전규격에 의한 시험검사서비스를 제공합니다.
       SEMI S2 Test - 반도체 제조설비에 대한 환경, 보건, 안전요구사항
       SEMI S3 Test - 가열 화학조 (Heated Chemical Baths) 시험검사 대행
       SEMI S9 Test - 반도체 제조설비에 대한 전기시험방법
                        → 당사는 공인시험소로서 공인시험성적서를 발행해 드립니다.
       SEMI S8 Test - 반도체 제조설비에 대한 인체공학 안전요구사항
       SEMI S10 Test - 반도체 제조설비에 대한 위험분석

    ※ SEMI 인증과 관련된 절차는 CE와 같으며 SEMI 인증기관으로는 TUV, UL, ETL등이 있습니다.